Interconnect bump structures for photo detectors

ABSTRACT

A method of assembling a photodetector assembly includes depositing bumps on a read out integrated circuit (ROIC) without depositing bumps on a photodiode array (PDA). The method includes assembling the PDA and ROIC together wherein each bump electrically interconnects the ROIC with a respective contact of the PDA. A photodetector assembly includes a PDA. A ROIC is assembled to the PDA, wherein the ROIC is electrically interconnected with the PDA through a plurality of electrically conductive bumps. Each bump is confined within a respective pocket between the ROIC and a respective contact of the PDA. The disclosed methods can enable focal plane array manufacturers to achieve low-cost production of ultra-fine pitch, large format imaging arrays.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a divisional of U.S. patent application Ser. No. 16/129,402filed Sep. 12, 2018, which is incorporated by reference herein in itsentirety.

BACKGROUND OF THE INVENTION 1. Field of the Invention

The present disclosure relates to interconnections, and moreparticularly to bump structures for electrically interconnectingcomponents such as in interconnecting photodetector array components.

2. Description of Related Art

Fine pitch, large format focal plane arrays (FPAs), require smallinterconnect bumps and minimum lateral expansion after hybridization.Traditional techniques use bumps with height to diameter ratios thatmake alignment difficult when interconnecting components. As a result,lateral expansion and the alignment difficulties limit how small amanufacturer can make the large format FPA pixel pitch.

The conventional techniques have been considered satisfactory for theirintended purpose. However, there is an ever present need for improvedbump structures for interconnecting components like focal plane arrays.This disclosure provides a solution for this problem.

SUMMARY OF THE INVENTION

A photodetector assembly includes a photodiode array (PDA). A read outintegrated circuit (ROIC) is assembled to the PDA, wherein the ROIC iselectrically interconnected with the PDA through a plurality ofelectrically conductive bumps. Each bump is confined within a respectivepocket between the ROIC and a respective contact of the PDA.

Each respective pocket can be laterally bounded by edges of apassivation layer of the ROIC and a sidewall passivation layer of thePDA. The sidewall passivation layer of the PDA can include an outersurface sub-layer that includes potassium. The electrically conductivebumps can include indium. Each bump can have a dimension in a directionfrom the ROIC toward the PDA of as low as 1 μm or less.

Each bump can electrically connect one pixel of the PDA to the ROIC. ThePDA can have a pixel pitch size of 10 μm or less. Pixels of the PDA canbe isolated from one another by mesa trenches with sidewall passivation.The mesa trenches can be etched into the PDA to provide relief of thestresses which otherwise lead to misalignment through wafer bowing andalso to provide electrical isolation between pixels. Misalignment causedby die bowing can be compensated by interconnecting deep-trench PDApixels with stress and bowing released due to the deep trench etch withsoft ROIC bumps through intermetallic bonding.

Mesas between the mesa trenches on the PDA can mate with ROIC bumps lessthan 1 um deep through intermetallic bonding, wherein high-pressurepressing of excess indium materials on each side of PDA and ROIC can beavoided due to the much smaller ROIC bumps mating directly to PDAcontacts through intermetallic bonding, and wherein short circuitsbetween neighboring pixels can be eliminated with this interconnectionstructure due to a high pressure press-free bonding process. Stress dueto the coefficient of thermal expansion mismatch between the PDA and theROIC can be reduced due to high aspect ratio (height:diameter) with thisinterconnect structure.

A method of assembling a photodetector assembly includes depositingbumps on a read out integrated circuit (ROIC) without depositing bumpson a photodiode array (PDA). The method includes assembling the PDA andROIC together wherein each bump electrically interconnects the ROIC witha respective contact of the PDA.

Depositing bumps on the ROIC can include using evaporation to depositthe bumps, wherein the bumps include indium. Depositing the bumps on theROIC can include keeping the bumps under a dimension of 1 μm in adirection from the ROIC to the PDA. The bump height is adjustable tofulfill the requirement of suppressing the bowing of die, a factor whichis also reduced by the stress relief during the mesa isolation etch.Assembling the PDA and ROIC together can include plasma treatmentfollowed by reflow of the PDA and/or ROIC to achieve intermetallicbonding between the ROIC, the contacts, and the bumps, e.g., so that thetraditional high press pressure for hybridization is avoided.

The method can include plasma treating the PDA and ROIC to remove localoxidation on contacts of the PDA and ROIC. Plasma treating the PDA andROIC can include adjusting the surface polarity of a dielectric outersurface sub-layer of a sidewall passivation layer of the PDA and ROIC toreduce wettability of bump material to the dielectric sub-layer.

Assembling the PDA to the ROIC can include confining each bump in arespective pocket between the ROIC and the respective contact of thePDA. Confining each bump in the respective pocket can result in no bumpmaterial flowing out of the respective pocket.

These and other features of the systems and methods of the subjectdisclosure will become more readily apparent to those skilled in the artfrom the following detailed description of the preferred embodimentstaken in conjunction with the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

So that those skilled in the art to which the subject disclosureappertains will readily understand how to make and use the devices andmethods of the subject disclosure without undue experimentation,preferred embodiments thereof will be described in detail herein belowwith reference to certain figures, wherein:

FIG. 1 is a schematic cross-sectional side elevation view of anexemplary embodiment of a photodiode array (PDA) constructed inaccordance with the present disclosure, showing the sidewall passivationlayer covering the sidewalls of the mesa trench with holes through thepassivation for electrical connections for the contacts;

FIG. 2 is a schematic cross-sectional side elevation view of the PDA ofFIG. 1, schematically indicating plasma treatment of the contacts;

FIG. 3 is a schematic cross-sectional side elevation view of the PDA ofFIG. 1, showing the contacts of the PDA aligned with interconnect bumpson a read out integrated circuit (ROIC); and

FIG. 4 is a schematic cross-sectional side elevation view of the PDA andROIC of FIG. 3, showing the PDA and ROIC assembled together with theinterconnect bumps confined within pockets.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Reference will now be made to the drawings wherein like referencenumerals identify similar structural features or aspects of the subjectdisclosure. For purposes of explanation and illustration, and notlimitation, a partial view of an exemplary embodiment of a photodiodearray (PDA) in accordance with the disclosure is shown in FIG. 1 and isdesignated generally by reference character 100. Other embodiments ofPDAs in accordance with the disclosure, or aspects thereof, are providedin FIGS. 2-4, as will be described. The systems and methods describedherein can be used to facilitate assembly of PDAs with read outintegrated circuits (ROICs) and to reduce pixel pitch size relative totraditional configurations.

The photodiode array 100 includes an absorption layer 106, a cap layer102 disposed on the surface 104 of the absorption layer 106, and aplurality of pixel diffusion areas 116 within the cap layer 102. Theabsorption layer 106 can be disposed on a buffer layer 108 that is on asubstrate layer 110, e.g., an InP substrate, on an opposite side of theabsorption layer 106 from the cap layer 102. A passivation layer 112 canbe included on the cap layer 102 opposite from the absorption layer 106.Each of the pixel diffusion areas 116 extends beyond the surface 104 ofthe absorption layer 106 and down into the absorption layer 106 (asoriented in FIG. 1) to receive a charge generated from photons(indicated with the large wavy arrows in FIG. 1) received through theabsorption layer 106 by the respective pixel diffusion area 116. Themesa trench 124 is defined through the cap layer 102 and through theabsorption layer 106. The sidewalls 126 of the mesa trench 124 arecovered with the sidewall passivation layers 128 but with the areas ofcontacts 118 etched open so the metal of the contacts 118 is uncoveredfor electrical connection as shown in FIG. 1.

The sidewall passivation layers 128 combined with the space gap createdby the mesa trench 124 can improve the reflection/absorbancecharacteristics of the absorption layer 106. The sidewall passivationlayers 128 are shown in FIG. 1 as a single layer for sake of clarity,however the sidewall passivation layers 128 include multiple dielectriclayers, which can effectively reduce dark current due to surface leakageas well as reducing stress (which would otherwise be high for thickcoatings, e.g., the sidewall passivation layers 128 can be up tohundreds of nanometers thick, e.g., over 300 nm thick). The very topsub-layer (as oriented in FIGS. 1 and 2) of the sidewall passivationlayer 128 is a high K coating with high surface tension, which helpsconfine the bump metal within the contact area.

Openings 132 through the sidewall passivation layers 128 are included toleave open each contact 118 for each pixel diffusion area 116 forelectrical connection through the sidewall passivation layers 128. Aportion 134 of the contact is sandwiched between the sidewallpassivation layers 128 and the passivation layer 112.

The final photoresist layer 130 can ultimately be removed by a liftoffprocess, plasma dry etch, or the like. The PDA is plasma treated, asindicated by the wavy arrows in FIG. 2, to remove local oxidation on thecontacts 118. The plasma treatment can utilize hydrogen, argon, and/orfluorocarbon plasma. Plasma treating the PDA 100 includes adjusting thesurface polarity of a dielectric outer surface sub-layer of a sidewallpassivation layer 128 of the PDA 100 to reduce wettability of bumpmaterial to the dielectric sub-layer. The outer surface sub-layer 129 ofthe sidewall passivation layer 128 can includes a high K material suchas potassium nitride.

With reference now to FIG. 3, the ROIC 200 is prepared with apassivation layer 202 on a substrate assembly 204. The interconnectbumps 206 are deposited on the ROIC 200 without a need for depositingany corresponding interconnect bumps on the PDA. Depositing the bumps206 on the ROIC 200 includes depositing the bumps 206 in openings 208 inthe passivation layer 202. The bumps 206 include indium. Depositing thebumps 206 on the ROIC 200 includes keeping the bumps 206 as low as 1 μmin a direction from the ROIC 200 toward the PDA 100, i.e., the bumps 206can be less than 1 μm tall in the vertical direction as oriented in FIG.3, i.e., prior to assembly the PDA 100 and ROIC 200 together. The bumpheight is adjustable, e.g., can be tailored, to fulfill the requirementof suppressing the bowing of die, a factor which is also reduced by thestress relief during the mesa isolation etch. After plasma treating thePDA 100 as discussed above with respect to FIG. 2, the PDA 100 can beflipped, e.g., from the orientation shown in FIG. 2 to the orientationshown in FIG. 3, and aligned with the ROIC 200 so the contacts 118 areeach aligned with a respective one of the bumps 206.

Referring now to FIG. 4, with the contacts 118 aligned with the bumps206, the ROIC 200 and PDA 100 can be assembled together, e.g., byheating as indicated by the wavy arrows in FIG. 4. The heat treatmentfor both PDA side and ROIC side helps the intermetallic bondingformation. When assembled as shown in FIG. 4, each bump 206 electricallyinterconnects the ROIC 200 with a respective contact 118 of the PDA 100through metallic bonding with very low pressure required for pressing,e.g., using just the pressure from gravity. Assembling the PDA 100 tothe ROIC 200 includes confining each bump 206 in a respective pocket 210between the substrate assembly 204 of the ROIC 200 and the respectivecontact 118 of the PDA 100. Each respective pocket 210 is laterallybounded by the combined edges 212 and 214 of a passivation layer 202 andthe sidewall passivation layer 128, respectively. While only shown incross-section in FIG. 4, those skilled in the art will readilyappreciate that the bumps are completely enclosed because the edges 212and 214 surround the lateral perimeter of the bumps, and the opposedsubstrate assembly 204 and respective contact 118 enclose the top andbottom of each pocket 210. Confining each bump 206 in the respectivepocket 210 results in no bump material flowing out of the respectivepocket 210, which is due not only to non-wetting surface tensioncharacteristics in the passivation layers 202 and 128 with respect toindium, but also to the plasma treatment for top dielectric polaritycharge before pressing for both the PDA and ROIC sides. Short circuitscan occur in traditional PDA's when the bump material flows duringassembly and contacts neighboring bumps. This can be eliminated usingsystems and methods as disclosed herein. Assembling the PDA 100 and ROIC200 together can include plasma treatment followed by reflow of the PDA100 and/or ROIC 200 to achieve intermetallic bonding between thecontacts 118 and the bumps 206, e.g., so that the traditional highpressure for hybridization is avoided.

With continued reference to FIG. 4, assembling the PDA 100 to the ROIC200 results in a photodetector assembly 10, wherein each bump 206electrically connects one pixel 12 of the PDA 100 to correspondingcircuit components of the ROIC 200 for forming image data based onsignals generated from exposing the pixels 12. Using systems and methodsas disclosed herein allows for the PDA 100 to have a pixel pitch size(PS) of 10 μm or less. The pixel pitch size PS in FIG. 4 is indicated asa single length direction in cross-section, but those skilled in the artwill readily appreciation that the pixels 12 can be rectangular orhexagonal, and are isolated from one another by a two-dimensional gridof the mesa trenches 124.

Mesa structures etched into the PDA surface as disclosed herein providerelief of the stresses which traditionally lead to misalignment throughwafer bowing and also provide electrical isolation between pixels. Theetched mesas on the PDA side can mate with small e.g., <1 um deep, ROICbumps through intermetallic bonding. The traditional high-pressurepressing of excess indium materials, such as 3-5 um Indium bumps, oneach side of PDA and ROIC is therefore avoided due to the much smallerROIC bumps mating directly to the PDA contacts through intermetallicbonding. Short circuits between neighboring pixels can be completelyeliminated with the disclosed interconnection structures thanks to thehigh pressure press-free bonding process. Misalignment caused by diebowing can be compensated by interconnecting the deep-trench PDA pixels(stress and bowing are released due to the deep trench etch) with thesoft ROIC bumps through intermetallic bonding. The size of each softROIC bump should be sized to appropriately fill the respective pockets210, without excessive over or under fill. The stress due to thecoefficient of thermal expansion (CTE) mismatch between PDA and ROIC,i.e., wherein a change in temperature causes thermalexpansion/compression in the PDA and ROIC at different rates, will alsobe reduced due to the high aspect ratio (Height:Diameter) with thisinterconnect structure.

The methods and systems of the present disclosure, as described aboveand shown in the drawings, provide for photodetector assemblies withsuperior properties including ease of assembly and reduced pixel pitchsize relative to traditional configurations. While the apparatus andmethods of the subject disclosure have been shown and described withreference to preferred embodiments, those skilled in the art willreadily appreciate that changes and/or modifications may be made theretowithout departing from the scope of the subject disclosure.

What is claimed is:
 1. A method of assembling a photodetector assemblycomprising: depositing bumps on a read out integrated circuit (ROIC)without depositing bumps on a photodiode array (PDA); and assembling thePDA and ROIC together wherein each bump electrically interconnects theROIC with a respective contact of the PDA.
 2. The method as recited inclaim 1, wherein depositing bumps on the ROIC includes using evaporationto deposit the bumps, wherein the bumps include indium.
 3. The method asrecited in claim 1, wherein depositing the bumps on the ROIC includeskeeping the bumps under a dimension of 1 μm in a direction from the ROICtoward the PDA.
 4. The method as recited in claim 1, wherein assemblingthe PDA and ROIC together includes reflow of the PDA and/or ROIC toachieve intermetallic bonding between the ROIC, the contacts, and thebumps, so traditional high press pressure for hybridization is avoided.5. The method as recited in claim 1, further comprising: plasma treatingthe PDA and ROIC to remove local oxidation on contacts of the PDA andROIC.
 6. The method as recited in claim 1, wherein assembling the PDA tothe ROIC includes confining each bump in a respective pocket between theROIC and the respective contact of the PDA.
 7. The method as recited inclaim 6, further comprising plasma treating the PDA and ROIC to removelocal oxidation on contacts of the PDA and ROIC, wherein plasma treatingthe PDA and ROIC includes adjusting the surface polarity of a dielectricouter surface sub-layer of a sidewall passivation layer of the PDA andROIC to reduce wettability of bump material to the dielectric sub-layer.8. The method as recited in claim 6, wherein confining each bump in therespective pocket results in no bump material flowing out of therespective pocket.